Improving Wafer Stage Performance With Multiple Hybrid Integrator-Gain Systems
نویسندگان
چکیده
منابع مشابه
Control Design for Integrator Hybrid Systems
We define controllability for hybrid systems as the existence of correct control-laws that transfer the hybrid plant between pre-defined subsets of the hybrid state-space. A methodology for analyzing controllability and synthesizing control-laws for a class of hybrid systems, applicable expecially in batch control, is proposed. We use a framework consisting of a hybrid plant and a hybrid contro...
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ژورنال
عنوان ژورنال: IFAC-PapersOnLine
سال: 2020
ISSN: 2405-8963
DOI: 10.1016/j.ifacol.2020.12.1894